0.1 µm Portable Particle Counter Model 3950
Two-channel portable particle counter with 0.1 µm sensitivity for ISO Class 1–3 semiconductor cleanrooms — Ethernet, RS-485 and USB interfaces, 3.4 kg portable, ISO 21501-4 calibrated.
Products
| Model | Group | Positioning | Core fit |
|---|---|---|---|
| Model 3950 | 0.1 µm Portable OPC | 2-channel portable particle counter at 0.1 µm and 0.3 µm sensitivity | ISO Class 1–3 semiconductor cleanrooms, nanotechnology |
Key Features
0.1 µm sensitivity — ISO Class 1–3 cleanroom capability
With 0.1 µm minimum detectable particle size, the Model 3950 is one of the few portable OPCs capable of ISO Class 1–3 semiconductor cleanroom classification per ISO 14644-1 Table A.1. Standard 0.3 µm OPCs cannot meet Class 1–3 requirements at the 0.1 µm reference particle size.
Simultaneous 0.1 µm and 0.3 µm channels
The two channels measure simultaneously — providing both the ultrafine 0.1 µm data required for ISO Class 1–3 classification and the standard 0.3 µm data in the same sample pass, enabling direct comparison with historical 0.3 µm OPC records without separate measurement runs.
Ethernet / RS-485 / USB — fab network integration
Ethernet (10/100 Mbit) and RS-485 multi-drop interfaces support integration into semiconductor fab environmental monitoring networks. Ethernet enables direct connection to fab monitoring servers; RS-485 supports daisy-chained distributed monitoring at multiple sample points.
Portable 3.4 kg — ISO Class 1 zone access
At 3.4 kg, the 3950 is portable enough for direct access to critical semiconductor process zones including minienvironments, SMIF pod interfaces, FOUP load ports and wafer transfer areas where only small instruments can be introduced.
Technical Specifications
| Parameter | Unit | Value / Description |
|---|---|---|
| OPTICAL SENSOR | ||
| Light source | — | High-power semiconductor laser |
| Detection principle | — | Single-particle optical scattering |
| Min. detectable particle size | µm | 0.1 at 50% counting efficiency |
| Counting channels | — | 2 simultaneous: 0.1 µm and 0.3 µm |
| Max. concentration (0.1 µm channel) | particles/cm³ | 10 (coincidence-limited) |
| Max. concentration (0.3 µm channel) | particles/L | 2,000,000 |
| FLOW SYSTEM | ||
| Sample flow rate | LPM / CFM | 2.83 LPM / 0.1 CFM — internal pump |
| USER INTERFACE | ||
| Display | — | Colour display with touch controls |
| Internal memory | records | Programmable — multiple location records |
| COMMUNICATION | ||
| Ethernet | — | 10/100 Mbit Ethernet — for fab monitoring network integration |
| RS-485 | — | Serial multi-drop for distributed monitoring systems |
| USB | — | PC data transfer and configuration |
| PHYSICAL | ||
| Weight | kg | 3.4 |
| Operating temperature | °C | 15 – 35 |
| CALIBRATION | ||
| Calibration standard | — | NIST-traceable ISO 21501-4 calibration certificate |
Values are summarized for page-level selection. Confirm final model configuration, accessories and calibration certificate before order placement.
Applications
ISO Class 1–3 classification and monitoring
Leading-edge semiconductor fab ISO Class 1–3 cleanroom classification and periodic monitoring at 0.1 µm — required for EUV lithography, advanced packaging and sub-10 nm process node environments.
Hard disk drive cleanroom monitoring
ISO Class 2 hard disk drive assembly cleanroom — 0.1 µm particle monitoring around head-disk assembly and slider bonding operations.
Optical coating cleanroom
Optical coating and laser optics manufacturing — ultrafine particle control around substrate preparation and deposition processes.
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